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WEB Catalog
Dual Thermo-chiller/High-performance Inverter Type HRZD
Products » WEB Catalog » Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers)
・Temperatures for 2 systems can be controlled separately by one chiller.
・Double inverter type: Substantially more energy is saved by using a DC inverter refrigerator and inverter pump. ・Space saving: Footprint reduced by 23% ・Reduced wiring, piping, and labor: Single power cable, Single facility-water piping system ・Compliant with SEMI Standards, CE-marking |
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Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
Applicable cylinder size |
Power consumption (W) |
Model |
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HRZD | −30 to 90℃ | 9.5 kW x 2 | ±0.1℃ | Water-cooled refrigeration |
Fluorinated liquid, Ethylene glycol aqueous solution (60%) |
Dual Thermo-chiller/High-performance Inverter TypeHRZD
Series | Download |
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HRZD |
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