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WEB Catalog
Slit Valve XGT
Products » WEB Catalog » High Vacuum Equipment » Slit Valves
・This product is suitable to act as the partition valve between
the load lock chamber and the transfer chamber or between the transfer chamber and the process chamber in semiconductor equipment or other equipment. |
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Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
Applicable cylinder size |
Power consumption (W) |
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XGT | Atmospheric pressure to 10-6 |
Inert gas type vacuum | 32 x 222 46 x 236 50 x 336 |
0.45 to 0.6 |
Slit ValveXGT
Series | Download |
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XGT |
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