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Normal Close High Vacuum Solenoid Valve XSA
Products » WEB Catalog » Process Valves » Compact 2/3 Port Solenoid Valves
Products » WEB Catalog » High Vacuum Equipment » High Vacuum Valves
・Minimum operating pressure: 1 × 10-6 Pa (abs)
・Leakage: Internal 1.3 × 10-9 Pa·m3/s, External 1.3 × 10-11 Pa·m3/s ・2 types of fittings are available. ・Power consumption: Max. 25% reduction ・Weight: Max. 18% lighter (0.5 kg → 0.41 kg) |
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Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
Applicable cylinder size |
Power consumption (W) |
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XSA | Normal Close | Air Inert gas |
Face seal fitting Compression fitting |
1/4, 3/8 |
XSA | Normal Close | Air Inert gas |
Female thread (Rc, NPT) |
1/8, 1/4, 3/8 |
Normal Close High Vacuum Solenoid ValveXSA
Series | Download |
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XSA |
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XSA |
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