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IN_PROD_561
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Clean Series/Low-Particle Generation
IN_PROD_1040
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Exhaust Cleaner for Clean Room/Clean Exhaust Filter
Exhaust Cleaner for Clean Room AMP
・An exhaust cleaner that can be used inside a clean room
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Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
Applicable cylinder size |
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AMP | 0.01 (Trapping efficiency 95%) | 200 to 1000 | 1/4,3/8,1/2,3/4 |
Exhaust Cleaner for Clean RoomAMP
Series | Download |
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AMP |
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Clean Exhaust Filter SFE
・This filter enables the direct exhaust of air in a clean room.
(Cleanliness class 4: ISO14644-1) Air can be directly exhausted in a clean room by simply mounting this product to the pneumatic equipment in the clean room. ・Piping for exhaust air and relief air is not required. Reduces piping installation work and space ・Noise reduction: 30 dB (A) or more ・One-touch fitting type is available. |
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Other Data |
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Series | Flow characteristics 4/2→3/5(A/B→E) C[dm3/(s・bar)] |
Flow characteristics 4/2→3/5(A/B→E) b |
Applicable cylinder size |
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SFE | 0.01 (Trapping efficiency 99.99%) | 3,30,65,130,200 | M5×0.8,R1/8,R1/4 φ4,φ6,φ8,φ10 |
Clean Exhaust FilterSFE
Series | Download |
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SFE |
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