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Instruction Manuals
Documents / Download » Instruction Manuals
- Directional Control Valves
- Fieldbus System Serial Transmission System
- Air Cylinders
- Rotary Actuators/<br/>Air Grippers
- Vacuum Equipment
- Air Preparation Equipment
- Modular F.R.L./<br/>Pressure Control Equipment
- Fittings and Tubing
- Flow Control Equipment
- Silencers/Exhaust Cleaners/Blow Guns/Pressure Gauges
- Switches/Sensors
- Static Neutralization Equipment
- Process Pumps
- Process Valves
- Chemical Valves/Fittings/Tubing/Needle Valves
- Temperature Control Equipment
- High Vacuum Equipment
- Industrial Filters
- Hydraulic Equipment
- Electric Actuators
- Pneumatic Instrumentation Equipment
|Instruction Manuals Information on Addition / Updates
Product name | Series/Model | Download | Replacement Procedure | Note |
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Thermo-chiller Installation , Operation |
HRS018-A□-20-□R HRS030-A□-20-□R |
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Vacuum Gripper Unit for Collaborative Robots |
ZXP-X1 | |||
Thermo-chiller Installation , Operation |
HRSH100/150/200/250 | |||
Thermo-chiller Installation , Operation |
HRSH090 | |||
Thermo-chiller Installation , Operation |
HRS200 | |||
Thermo-chiller Installation , Operation |
HRS100/150 | |||
Thermo-chiller Installation , Operation |
HRS090 | |||
Thermo-chiller Installation , Operation |
HRS060 | |||
Thermo-chiller Installation , Operation |
HRS040 | |||
Thermo-chiller Installation , Operation |
HRS030 | |||
Thermo-chiller Installation , Operation |
HRS050-A□-20-□-R | |||
Thermo-chiller Installation , Operation |
HRS012/018/024 | |||
Thermo-chiller Installation , Operation |
HRS050 | |||
Ionizer / Gun type | IZG10 | |||
Thermo-chiller Installation , Operation |
HRL100/200/300-A□40 | |||
Pressure Relief 3 Port Valve with Locking Holes (For AC-D) | VHS-D | |||
5 Port Solenoid Valve | SQ1000/2000 | |||
5 Port Solenoid Valve | SV1000/2000/3000/4000 | |||
Electric Slide Table / High Precision Type | LESYH16-X171 LESYH25-X171 |
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Thermo-chiller Installation , Operation |
HRR10 | |||
Digital Pressure Switch with IO-Link | ZSE20B(F)/ISE20B-L | Configuration file: IODD file | ||
Water Resistant 2-Color Indication Type Solid State Auto Switch |
D-M9*A(V) | |||
Refrigerated Air Dryer | IDF60~90 | |||
Non Plug-in Compact 5-Port Solenoid Valve | JSY1000/3000/5000 | |||
Plug-in Compact 5-Port Solenoid Valve | JSY1000/3000/5000 | |||
Compact/Lightweight 2 Port Solenoid Valve for Water and Air |
VDW-XF | |||
Controller Setting Software For LATCA |
LATC-Configurator Windows10 Driver |
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Controller Setting Software For LATCA |
LATC-Configurator Windows8.1 Driver |
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Controller Setting Software For LATCA |
LATC-Configurator Windows7 Driver |
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Step Motor Controller (Servo / 24VDC) |
JXC51/JXC61 | |||
2-Color Display Digital Flow Switch | PF2M7□□-□-□□-□□□-X731 | Configuration file: IODD file | ||
Thermo-chiller Communication function |
HRR012/018/024/030 | |||
Low Profile 2/3-Port Solenoid Valve | SX90/090 | |||
Card Motor Controller (Modbus Communication Edition) |
LATCA | |||
Multistage Ejector | ZL3/ZL6 | |||
Card Motor Controller (Pulse input edition) |
LATCA | |||
Card Motor Controller (Step Data input edition) |
LATCA | |||
Card Motor Simple Setting (Step Data Input version) |
LAT3/LATCA | |||
Data Writing Software for Blank Controller [Compatible Blank Controller] JXC□1□-BC |
JXC-BCW | |||
Card Motor Controller (Serial Communication edition) |
LATCA | |||
Air Gripper Unit for Collaborative Robots | JMHZ2-X7400B | |||
Separate Controller Ionizer / Nozzle type | IZT43 | |||
Thermo-chiller Installation , Operation |
HRSE012/018/024 | |||
Digital Flow Switch for Air | PF3A7□H-L | Configuration file: IODD file | ||
SI Unit EtherNet/IP™ compatible |
EX600-SEN3-X80 | The configuration file is the EDS for EX600-SEN3-X80. | ||
IO-Link Master Unit | EX600-LAB1 EX600-LBB1 |
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Electric Actuator/ Slider Type |
LEJ | |||
Magnet Gripper | MHM | |||
Electric Actuator Rod Type /Guide Rod Type |
LEY/LEYG | |||
Controller Setting Kit (LECP6,LECA6,LECPA) |
LECW2 Software (ACT Controller) |
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Controller Setting Kit (JXC□1□) |
JXC-W2 Controller setting kit Software (ACT Controller) |
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Electric Gripper (2Finger Type, 3Finger Type) |
LEH/LEHZ,LEHF,LEHS | |||
Electric Slide Table | LES LESH |
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Digital Display Setting Equipment | PSE3□0AC | Digital Switch Setting System | ||
Pressure Sensor Controller | PSE300 | Digital Switch Setting System | ||
High-precision Digital Pressure Switch | ISE70G/75G/76G/77G-L2 | Configuration file: IODD file | ||
High-precision Digital Pressure Switch | ISE70/71-□-AB | |||
High-precision Digital Pressure Switch | ISE70/71-L2 | Configuration file: IODD file | ||
Compact Digital Pressure Switch | ZSE10(F)/ISE10 | Digital Switch Setting System | ||
Digital Pressure Switch | ZSE20(F)/ISE20 | Digital Switch Setting System | ||
Digital Pressure Switch | ZSE20B(F)/ISE20B | |||
Digital Pressure Switch | ZSE20A(F)/ISE20A | |||
Digital Pressure Switch | ZSE20C(F)/ISE20C(H) | |||
EtherNet/IP Direct input typee Step Motor Controller (Servo 24VDC) |
JXC91 | |||
IO-Link Direct input type Step Motor Controller (Servo/24VDC) |
JXCL1 | |||
EtherCAT Direct Input Type Step Motor Controller (Servo/24VDC) |
JXCE1 | |||
PROFINET Direct Input Type Step Motor Controller (Servo/24VDC) |
JXCP1 | |||
DeviceNet Direct Input Type Step Motor Controller (Servo/24VDC) |
JXCD1 | |||
Electric Rotary Table | LER | |||
Separate Controller Ionizer / Bar type | IZT40/41/42 | |||
SI Unit EtherNet/IP™ Compatible Output 32 points NPN |
EX260-SEN2-X205 | |||
Liquid Dispense Pump (Solenoid Type) | LSP | |||
Peltier-Type Thermo-con Peltier-typeair cooled |
HEC-A | |||
Solid State Auto Switch | D-M9*/D-M9*W | |||
AC Servo Motor Driver / (Pulse input type/Positioning type) |
LECSB2-T | |||
Data Writing Software for Blank Controller [Compatible Blank Controller] LECP6□-BC LECA6□-BC LECPA□-BC LECPMJ-BC |
LEC-BCW | |||
NAAMS Standards Compliant Power Clamp Cylinder |
CKZ3N-X2742A/CKZ3N-X2568 CKZ3T-X2734/CKZ3T-X2568 |
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Valve Controller | VXFC060A/VXFC10A | |||
Thermo-chiller Installation , Operation |
HRR012/018/024/030 | |||
Communication cable for controller setting kit (JXC□1□) |
JXC-W2A-C USB Driver and Install Manual |
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Thermo-dryer | IDH□ | |||
5 Port Solenoid Valve | VQC4000 | |||
Refrigerated Air Dryer / For Use in North, Central and South America | IDFB3E~15E-11 | |||
Electric Actuator /Slider Type AC Servo Motor |
LEF | |||
Electric Actuator Rod Type /Guide Rod Type AC Servo Motor |
LEY/LEYG | |||
2-Color Display Digital Flow Switch | PF2M7□□ | Configuration file: IODD file | ||
Digital Flow Switch for Air | PF2A2□□ | |||
Micro Mist Separator | AMD30-D | |||
Mist Separator | AM30-D | |||
Main Line Filter | AFF30-D | |||
Thermo-chiller Installation , Operation |
HRL100/200/300-A□20 | |||
Process Pump | PAX1#1# | |||
High Purity Chemical Liquid Valve | LVA/LVC | |||
Intelligent Valve Controller | ND9000 | |||
Digital Valve Controller | ND7000 | |||
AC Servo Motor Driver / CC-Link Type |
LECSC2-T | |||
Ionizer / Bar type | IZS40/41/42 | |||
Refrigerated Air Dryer / For Use in Europe, Asia, and Oceania | IDFA22E~75E-23 | |||
Refrigerated Air Dryer / For Use in North, Central and South America | IDFB22E~75E-11/23/46 | |||
Refrigerated Air Dryer / For Use in Europe, Asia, and Oceania | IDFA3E~15E1-23 | |||
Refrigerated Air Dryer High temperature air inlet type |
IDU3E~6E-10/20/23 | |||
Example of fail s afe circuit for a ir s ervo c ylinder IN 777 | IN-777 | |||
Air servo cylinder | IN-777 | |||
Air servo cylinder | IN-777-□□-□F□-H□ | |||
Controller Setting Kit (LECP6,LECA6,LECPA,LECPMJ,JXC□1□) |
LEC-W2A-C Install Manual |
USB Driver for Windows7 (32-bit, 64-bit), Windows8.1 (32-bit, 64-bit), Windows10 (32-bit, 64-bit) Note) Not applicable to LEC-W1 and LEC-W2A-C. |
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Controller Setting Kit (LECP6,LECA6,LECPA,LECPMJ,JXC□1□) |
LEC-W2,JXC-W2 WindowsXP,Windows7 Driver and Install Manual |
USB Driver for WindowsXP (32-bit), Windows7 (32-bit, 64-bit). Note) Not applicable to LEC-W1 and LEC-W2A-C. |
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SI Unit CC-Link Compatible Compatible version:1.10 |
EX260-SMJ3/4 | Output 16 points | ||
SI Unit CC-Link Compatible Compatible version:1.10 |
EX260-SMJ1/2 | Output 32 points | ||
Refrigerated Air Dryer / For Use in North, Central and South America | IDFB60~90 | |||
Multi-channel Digital Sensor Monitor | PSE202A-□ PSE203A-□ |
Configuration file: IODD file | ||
Multi-channel Digital Sensor Monitor | PSE20□A | |||
I/O Configurator for NFC (SMC Wireless System EX600-WEN/PN/SV) Ver. 2.60 |
EX600-WEN EX600-WPN EX600-WSV Initial setting application |
Japanese,English,Chinese | ||
I/O Configurator for NFC (SMC Wireless System EX600-WEN/PN/SV) Ver. 2.60 |
EX600-WEN EX600-WPN EX600-WSV Initial setting application |
Japanese,English,Chinese | ||
Pilot Operated 2 Port Solenoid Valve | VXP | |||
Electro-Pneumatic Regulators 10bit Digital input type(Refreshing Product) |
ITV1000/2000/3000/2090-60□ | |||
Refrigerated Air Dryer / For Use in Europe, Asia, and Oceania | IDFA60~90 | |||
Refrigerated Air Dryer | IDFC60~90 | |||
Peltier-Type Thermo-con Communication Manual |
HEC001/002/003/006/012 | |||
Precision Regulator | IR3000-A | |||
Precision Regulator | IR2000-A | |||
Return Filter | FH100 | |||
Thermo-chiller | HRW | |||
Process Pump | PA(P)3310 | |||
Process Pump | PA(P)3313 | |||
Sensor Monitor | PSE3□□A | |||
Lock-Up Valve 3-Ports | IL220 | |||
Lock-Up Valve | IL201・211 | |||
Booster Relay | IL100 | |||
3-color Digital Flow Switch for water | PF3W7□□-Z/L | Configuration file: IODD file | ||
Wireless System PROFINET compatible |
EX600-WPN/EX600-WSV | |||
Cylinder with Lock | C96N | |||
Cylinder with Lock | CP96N | |||
Air Cooled Thermo Con (Water-cooled) for Rack Mount Installation and Maintenance Manual |
HECR-W | |||
Digital Flow Switch for Air | PF3A7□H | |||
Water Resistant 2-Color Indication Type Solid State Auto Switch |
D-M9*A(V) | |||
Solid State Auto Switch | D-S9*/D-T99*/D-S7*/D-T79* | |||
Solid State Auto Switch | D-M9*/D-M9*W/D-M9*E | |||
Speed Controller Standard Type In-line Type |
AS1000~5000 | |||
Thermo-chiller Communication function |
HRSH | |||
Thermo-chiller Communication function |
HRS100/150/200 | |||
Thermo-chiller Communication function |
HRS090 | |||
Thermo-chiller Communication function |
HRS012/018/024/030/050/060 | |||
Hyper Fitting Work Procedure Instructions |
LQ1,LQ2 | |||
Wireless System EtherNet/IP™ Compatible |
EX600-WEN/EX600-WSV | |||
Filter Regulator | AW-B | |||
Filter Regulator with Backflow Function |
AW□K-B | |||
Hyper Fitting /Flare Type Fitting Procedure |
LQ3 | |||
Digital Flow Switch for water | PF3WB PF3WC PF3WS PF3WR |
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Programless Controller (with stroke study) |
LECP2 | |||
Programless Controller | LECP1 | Wiring Method | ||
Desktop duster box | ZVB40 | |||
Desktop duster box | ZVB20 | |||
Actuator Position Sensor | D-MP□ | Configuration file: IODD file | ||
Main Line Filter | AFF70D、AFF80D、AFF90D | |||
Push-lock Type Speed Controller with One-touch Fitting Compact Type |
JAS | |||
Thermo-chiller Communication function |
HRL100/200/300 | |||
CC-Link DeviceNet PROFIBUS DP Assembly Instruction(Push-in type) |
PCA-1075526 PCA-1075528 PCA-1075530 PCA-1075527 PCA-1075529 PCA-1075531 |
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2-Color Display Digital Flow Switch | PFMB7201 | Digital Switch Setting System | ||
2-Color Display Digital Flow Switch | PFM5□□ | Digital Switch Setting System | ||
2-Color Display Digital Flow Switch | PFM7□□ | Digital Switch Setting System | ||
Refrigerated Air Dryer High temperature air inlet type |
IDU8E~15E1-10/20/23 | |||
Refrigerated Air Dryer Standard temperature air inlet type |
IDF22E~75E-20/30 | |||
Refrigerated Air Dryer Standard temperature air inlet type |
IDF1E~15E1-10/20 | |||
Refrigerated Air Dryer High temperature air inlet type |
IDU22E~75E-23/30 | |||
Communication cable for controller setting kit | LEC-W2A-C Install Manual |
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3 Port Air Operated Valve | VPA3145・3165・3185 | |||
2-color Digital Pressure Switch | ZSE80(F)/ISE80(H) | Digital Switch Setting System | ||
In-line Air Filter | ZFC | |||
Rotary Actuator | CRB | |||
Vacuum Unit Vacuum Ejectors/Vacuum Pump Systems |
ZK2 | |||
Air Cylinder | CA2-Z | |||
Digital Pressure Switch | ZSE30AF-X576/X577/X578/X579/X580 | |||
Clean Gas Filter Disposable type/Straight type |
SFB30□ | |||
Clean Gas Filter Cartridge type/Straight type |
SFB10□、SFB20□ | Replacement Procedure | ||
Clean Gas Filter Cartridge type/Disc type |
SFA | Replacement Procedure | ||
Clean Gas Filter Disposable type/Multiple disc type |
SFC10□ | |||
Air Suction Filter with One-touch Fittings | ZFB | |||
Air Suction Filter | ZFA | |||
SI Unit PROFINET Compatible |
EX245-SPN1A EX245-SPN2A EX245-SPN3A |
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4-axis Step Motor Controller (EtherNet/IP™ type) |
JXC93 | |||
4-axis Step Motor Controller (EtherNet/IP™ type) |
JXC93 | |||
4-axis Step Motor Controller (Parallel I/O type) |
JXC73/83 | |||
Digital Gap Checker | ISA3-H□L | Configuration file: IODD file | ||
Digital Gap Checker | ISA3-G□L | Configuration file: IODD file | ||
Digital Gap Checker | ISA3-F□L | Configuration file: IODD file | ||
Modular Type F.R.L. Unit | AC-A | |||
Step Motor Controller With Step data Teaching Function |
LECP6-XB120 | |||
SI Unit IO-Link Device |
EX260-SIL1 | Instructions for Configurations file | ||
Multistage Ejector | ZL112A | |||
Output block Power block for EX250, 500 Accessories for serial |
EX9-OET#/OEP#/PE1 | |||
Input block for EX250 Accessories for serial |
EX250-IE1/2/3 | |||
3 Port Air Operated Valve | VTA325 | |||
5 Port Solenoid Valve/ISO Standard | VQ7-6/7-8 | |||
5 Port Solenoid Valve | SX3000/5000/7000 | |||
Stroke Reading Cylinder with Brake Controller |
CE2 CEU2 |
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Digital Flow Switch for Water | PF2W7□□(T) | Digital Switch Setting System | ||
AC Servo Motor Driver / SSCNET III/H type |
LECSS2-T | Wiring Method Recommended Parameter Values by Actuator Model |
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AC Servo Motor Driver / Pulse input type (For absolute encoder) |
LECSB | Wiring Method Recommended Parameter Values by Actuator Model |
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Digital Flow Switch for water | PF3W711-□-LT-□-X445 | Configuration file: IODD file | ||
Large Size 3 Port Solenoid Valve | VP3145・3165・3185 | |||
Digital Pressure Switch | ISE35 | Digital Switch Setting System | ||
Digital Gap Checker 2 switch outputs (NPN or PNP) |
ISA3-□□A/B-□ | |||
Digital Gap Checker | ISA3 | Digital Switch Setting System | ||
Micro Mist Separator | AMD70D、AMD80D、AMD90D | |||
Mist Separator | AM70D、AM80D、AM90D | |||
3-color Digital Flow Switch for water | PF3W3□□ | Digital Switch Setting System | ||
3-color Digital Flow Switch for water | PF3W5□□ | Digital Switch Setting System | ||
3-color Digital Flow Switch for water | PF3W7□□ | Digital Switch Setting System | ||
Digital Flow Switch for Deionized Water and Chemicals |
PF2D5□□ | |||
Digital Flow Switch for Water | PF2W5□□(T) | Digital Switch Setting System | ||
Digital Flow Switch for Air | PF2A3□□ | Digital Switch Setting System | ||
Digital Flow Switch for Air | PF2A5□□ | Digital Switch Setting System | ||
Digital Flow Switch for Air | PF2A7□□H | Digital Switch Setting System | ||
Digital Flow Switch for Air | PF2A7□□ | Digital Switch Setting System | ||
Flow Sensor | PFMV3□□ | |||
Flow Sensor | PFMV5□□ | Digital Switch Setting System | ||
3-Color Display Digital Flow Switch | PFMC7501,7102,7202 | Digital Switch Setting System | ||
2-Color Display Digital Flow Switch | PFMB7501,7102,7202 | Digital Switch Setting System | ||
2-Color Display Digital Flow Switch | PFM3□□ | |||
CC-Link Direct Input Type Step Motor Controller (Servo/24VDC) |
LECPMJ | Wiring Method | ||
Step Motor Controller (Servo / 24VDC) |
LECP6 | Wiring Method | ||
I/O Configurator for NFC (SMC Wireless System EX600-WPN/SV) Ver. 2.10 |
EX600-WPN EX600-WSV Initial setting application |
Not for EX600-WEN Japanese,English,Chinese |
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I/O Configurator for NFC (SMC Wireless System EX600-WEN/PN/SV) Ver. 2.20 |
EX600-WEN EX600-WPN EX600-WSV Initial setting application |
Japanese,English,Chinese | ||
I/O Configurator for NFC (SMC Wireless System EX600-WEN/SV) Ver. 2.00 |
EX600-WEN EX600-WSV Initial setting application |
Not for EX600-WEN Japanese,English,Chinese |
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I/O Configurator for NFC (SMC Wireless System EX600-WEN/PN/SV) Ver. 2.20 |
EX600-WEN EX600-WPN EX600-WSV Initial setting application |
Japanese,English,Chinese | ||
Aluminum High Vacuum Angle Valve Electromagnetic/ Bellows Pressure Balance |
XLS | |||
Aluminum High Vacuum Angle Valve Manual/Bellows Sea |
XLH | |||
AluminumHigh Vacuum Angle Valve 2-Step Control, Single Acting/ Bellows Seal, O-ring Seal |
XLD | |||
Aluminum High Vacuum Angle Valve Normally Closed / Bellows Seal |
XLA | |||
Refrigerated Air Dryer / For Use in Europe, Asia, and Oceania | IDFA6E-20 | |||
Membrane Air Dryer Made to Order |
IDG-X032 | |||
Membrane Air Dryer Made to Order |
IDG-X017 | |||
Membrane Air Dryer | IDG30□A~100SA | |||
Membrane Air Dryer | IDG60~100 | |||
Membrane Air Dryer | IDG10,20 | |||
Membrane Air Dryer | IDG3,5 | |||
EtherNet/IP™ Compatible IP Address Setting Software Presetting Type Applicable products JXC91 JXC92 JXC93 |
EX9-ZSW-IPC2 | Set all IP addresses with the list of MAC addresses. (Max.200 addresses) | ||
EtherNet/IP™ Compatible IP Address Setting Software Interactive Type Applicable products JXC91 JXC92 JXC93 |
EX9-ZSW-IPC1 | Set the IP address while confirming the connected unit (MAC address). (Max.200 addresses) | ||
EtherNet/IP™ Compatible IP Address Setting Software Interactive Type Applicable products EX260-SEN* EX500-GEN2 EX600-SEN* EX600-WEN* |
EX9-ZSW-IPC1 | Set the IP address while confirming the connected unit (MAC address). (Max.200 addresses) | ||
EtherNet/IP™ Compatible IP Address Setting Software Presetting Type Applicable products EX260-SEN* EX500-GEN2 EX600-SEN* EX600-WEN* |
EX9-ZSW-IPC2 | Set all IP addresses with the list of MAC addresses. (Max.200 addresses) | ||
Step Motor Driver (Pulse input type) | LECPA | Wiring Method | ||
Air Press Cylinder | MWP | |||
Air Slide Table | MXQ,□A,□B,□C | |||
Stroke Rading Rodless Cylinder with Brake |
ML2B | |||
Stroke Rading Rodless Cylinder with Brake Controller |
ML2B CEU2 |
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Multi Channel Pressure Sensor Controller |
PSE200 | Digital Switch Setting System | ||
Pressure Sensor for General Fluids | PSE575/576/577 | |||
Pressure Sensor for General Fluids | PSE570/573/574 | Digital Switch Setting System | ||
Pressure Sensor For General Fluids | PSE56□ | Digital Switch Setting System | ||
Low Differential Pressure Sensor | PSE550 | Digital Switch Setting System | ||
Pressure Sensor | PSE54□ | Digital Switch Setting System | ||
Pressure Sensor | PSE53□ | Digital Switch Setting System | ||
2-color Digital Pressure Switch | ISE70/ISE75 | |||
2-color High Accuracy Digital Pressure Switch |
ZSE40A(F)/ISE40A | Digital Switch Setting System | ||
2-color High Accuracy Digital Pressure Switch |
ZSE30A(F)/ISE30A | Digital Switch Setting System | ||
Refrigerated Air Dryer / For Use in Europe, Asia, and Oceania | IDFA100F~150F-38/40 | |||
Refrigerated Air Dryer Standard temperature air inlet type |
IDF100F~150F-30 | |||
Aluminum High Vacuum Angle Valve Vacuum Pilot |
XLJ | |||
High Speed 2 Port Valve | SX10 | |||
Economy valve | VEX5 | |||
3 Port Solenoid Valve | VT315 | |||
AC Servo Motor Driver / CC-Link direct input type (For absolute encoder) |
LECSC | Wiring Method Recommended Parameter Values by Actuator Model |
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Modular Type F.R.L. Unit | AC-B | |||
Zero Differential Pressure Type Pilot Operated 2 Port Solenoid Valve |
VXZ | |||
Pilot Operated 2 Port Solenoid Valve | VXD | |||
Direct Operated 2 Port Solenoid Valve | VX21/22/23 | |||
Direct Operated 3 Port Solenoid Valve | VX31/32/33 | |||
Industrial Filter/Vessel Series | FGD | |||
Digital Flow Switch for water | PF3W740-□-LT-□-X445 | Configuration file: IODD file | ||
Digital Flow Switch for water | PF3W720-□-LT-□-X445 | Configuration file: IODD file | ||
Digital Flow Switch for water | PF3W704-□-LT-□-X445 | Configuration file: IODD file | ||
5 Port Solenoid Valve Direct Operated Poppet Type |
VK3000 | |||
3 Port Solenoid Valve Direct Operated Poppet Type |
VK300 | |||
AC Servo Motor Driver / Pulse input type (For incremental encoder) |
LECSA | Wiring Method Recommended Parameter Values by Actuator Model |
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Digital Flow Monitor | PFG3□0 | |||
SI Unit CC-Link IE Compatible |
EX600-SCF1-X60 EX600-GILB-X60 |
Connects to IO-Link master unit | ||
Thermo-chiller | HRZ | |||
Air Cylinder | MB-Z | |||
3 Port Air Operated Valve | VTA315 | |||
Micro Mist Separator | AFD-A | |||
Mist Separator | AFM-A | |||
Air Filter | AF-A | |||
Stainless Steel High Vacuum Angle/In-line Valve Manual/Bellows Sea |
XMH/XYH | |||
Stainless Steel High Vacuum Angle/In-line Valve 2-Step Control, Single Acting/ Bellows Seal, O-ring Seal |
XMD/XYD | |||
Stainless Steel High Vacuum Angle/In-line Valve Double Acting/Bellows Seal |
XMC/XYC | |||
Stainless Steel High Vacuum Angle/In-line Valve Normally Closed / Bellows Seal |
XMA/XYA | |||
SI Unit Ethernet POWERLINK |
EX600-SPL1-X26 EX600-ED# |
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E-P HYREG | VY1 | |||
5 Port Air Operated Valve | VPA4□50/4□70 | |||
3 Port Solenoid Valve Direct Operated Poppet Type |
VT325 | |||
3 Port Solenoid Valve | V100 | |||
Peltier-Type Chemical Thermo-con | HED | |||
Cylinder with lock | MWB | |||
Thermo-dryer | IDH□ | |||
Lock unit | MWB-UT | |||
IO-Link Direct input type Step Motor Controller (Servo/24VDC) |
JXCL1 | Configuration file: IODD file | ||
Regulator for Chemical Liquids | LVR | |||
Clean Air Module | LLB | |||
Low Torque Rotary Joint | MQR | |||
Low Friction Cylinder/Metal Seal | MQQ/MQM/MQP | |||
5 Port Solenoid Valve | SY3000/5000/7000 | |||
Electromagnetic Type Digital flow switch | LFE | Digital Switch Setting System | ||
Electromagnetic Type Digital flow switch | LFE | Digital Switch Setting System | ||
Compact Rotary Actuator | CRQ2 | |||
Rotary Actuator | CRA1 | |||
SI Unit Ethernet POWERLINK |
EX260-SPL1 | Output 32 points PNP | ||
SI Unit Ethernet POWERLINK |
EX260-SPL3 | Output 16 points PNP | ||
Heavy Duty Stopper Cylinder | RS2H | |||
Stopper Cylinder | RSQ-Z | |||
Electro-Pneumatic Proportional Valve | VEP/VEF/VEA/VER | |||
3 Port Solenoid Valve Direct Operated Poppet Type |
VT317 | |||
5 Port Solenoid Valve | VP4□50/4□70 | |||
3 Port Solenoid Valve | SYJ300/500/700 | |||
AC Servo Motor Driver / MECHATROLINK-Ⅲ type |
LECYU | Recommended Parameter Values by Actuator Model | ||
AC Servo Motor Driver / MECHATROLINK-Ⅱ type |
LECYM | Recommended Parameter Values by Actuator Model | ||
AC Servo Motor Driver / SSCNET III type (For absolute encoder) |
LECSS | Wiring Method Recommended Parameter Values by Actuator Model |
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Digital Pressure Switch with IO-Link | ZSE20B(F)/ISE20B-X101 | Configuration file: IODD file | ||
SI Unit IO-Link Device |
EX260-SIL1-X207 EX260-SIL1-X210 EX260-SIL3-X207 |
Configuration file: IODD file | ||
5 Port Solenoid Valve | VQ4000/5000 | |||
Aluminum High Vacuum Angle Valve Air Operated/with Solenoid Valve Normally Closed/O-ring Seal |
XLFV-2 | |||
Aluminum High Vacuum Angle Valve Normally Closed/O-ring Seal |
XLF-2 | |||
XLA-2, XLC-2 Series Replacement of bellows assembly |
XLA/XLC-2 | |||
Aluminum High Vacuum Angle Valve Air Operated/with Solenoid Valve Normally Closed / Bellows Seal |
XLAV-2 | |||
Precision Regulator Air Operated Type |
IR3120 | |||
Precision Regulator Basic Type |
IR3000/3010/3020 | |||
5 Port Solenoid Valve | VQ1000/2000 | |||
Regulator valve | VEX1 | |||
Air Reservoir | CG1*N25&100-*Z-X2992 | |||
Air Reservoir | CG1*N25&100-*Z-X2992 | |||
Stroke Reading Cylinder | CE1 | |||
3-axis Step Motor Controller (EtherNet / IP™タイプ) |
JXC92 | |||
3-axis Step Motor Controller (EtherNet / IP™タイプ) |
JXC92 | |||
SI Unit (Compatible input and output) DeviceNet™ Compatible |
EX250-SDN1-X102 | Instructions for Configurations file | ||
SI Unit (Compatible input and output) DeviceNet™ Compatible |
EX250-SDN1 | Instructions for Configurations file | ||
Ionizer / Nozzle type | IZN10E | |||
Controller setting software, (For 3-axis Step Motor Controller) Installation Manual |
JXC-MA1 Controller Setting Software |
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SI Unit CC-Link Compatible Compatible version:1.10 |
EX180-SMJ5 | Output 32 points PNP | ||
SI Unit CC-Link Compatible Compatible version:1.10 |
EX180-SMJ3 | Output 32 points NPN | ||
Controller setting software, (For 3-axis Step Motor Controller) Installation Manual |
JXC-MA1 Installation Manual |
|||
3 Port Solenoid Valve Pilot Operated Poppet Type |
VG342 | |||
Controller Setting Software (For 4-axis Step Motor Controller) |
JXC-W1 Install Manual |
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Thermo-chiller Communication function |
HRSH090 | |||
Electrostatic Sensor Monitor | IZE11* | |||
DeviceNet Direct Input Type Step Motor Controller (Servo/24VDC) |
JXCD1 | |||
PROFINET Direct Input Type Step Motor Controller (Servo/24VDC) |
JXCP1 | |||
EtherNet/IP Direct input typee Step Motor Controller (Servo 24VDC) |
JXC91 | |||
EtherCAT Direct Input Type Step Motor Controller (Servo/24VDC) |
JXCE1 | |||
3 Port Solenoid Valve Direct Operated Poppet Type |
VT307 | |||
Air Cooled Thermo Con for Rack Mount Communication Manual |
HECR | |||
Aluminum High Vacuum Angle Valve Doubleacting / O-ring seal |
XLG-2 | |||
Aluminum High Vacuum Angle Valve Doubleacting / Bellows seal |
XLC-2 | |||
Handheld Terminal for EX600 Accessories for serial |
EX600-HT1A | |||
SI Unit PROFINET Compatible |
EX260-SPN1/2/3/4 | Instructions for Configurations file | ||
Space Saving Vacuum Ejector/Pump System | ZQ | |||
Electric Actuator/Slider Type | LEF | |||
SI Unit PROFINET Compatible |
EX245-SPN1 | |||
Vacuum Regulator | IRV10/20 | |||
Precision Regulator | IR1000-A | |||
Regulators | IR3200-A | |||
Regulators | IR2200-A | |||
Regulators | IR1200-A | |||
Controller Setting Kit (LECP6,LECA6,LECPA,LECPMJ,JXC□1□) |
LEC-W2,JXC-W2 Window8.1 Driver and Install Manual |
USB Driver for Windows8.1 (32-bit, 64-bit). Note) Not applicable to LEC-W1 and LEC-W2A-C. |
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Thermo-chiller | HRZD | |||
Refrigerated Air Dryer Standard temperature air inlet type |
IDF15E1-10/20 | |||
Air Cylinder | CG1-Z | |||
Digital oressure switch for energy-saving control ejector | ZK2-ZSV□□□□-A | |||
High Pressure Coolant Valve | SGH | |||
Coolant Valve | SGC | |||
3 Port Solenoid Valve | VQZ100/300/500 | |||
Controller Setting Software (For 4-axis Step Motor Controller) |
JXC-W1 | |||
High Vacuum Solenoid Valve | XSA | |||
Power Valve Precision Regulator | VEX | |||
SI Unit EtherCAT Compatible |
EX260-SEC1/2/3/4 | Instructions for Configurations file | ||
SI Unit PROFIBUS-DP Compatible Compatible version:V0 |
EX260-SPR7/8 | Output 16 points D-sub connector | ||
SI Unit PROFIBUS-DP Compatible Compatible version:V0 |
EX260-SPR3/4 | Output 16 points M12 connector | ||
SI Unit PROFIBUS-DP Compatible Compatible version:V0 |
EX260-SPR5/6 | Output 32 points D-sub connector | ||
SI Unit PROFIBUS-DP Compatible Compatible version:V0 |
EX260-SPR1/2 | Output 32 points M12 connector | ||
SI Unit DeviceNet™ Compatible |
EX260-SDN2 | Output 32 points NPN | ||
SI Unit DeviceNet™ Compatible |
EX260-SDN4 | Output 16 points NPN | ||
SI Unit DeviceNet™ Compatible |
EX260-SDN3 | Output 16 points PNP | ||
SI Unit DeviceNet™ Compatible |
EX260-SDN1 | Output 32 points PNP | ||
SI Unit EtherNet/IP™ Compatible Output 16 points NPN |
EX260-SEN4 | Instructions for Configurations file | ||
SI Unit EtherNet/IP™ Compatible Output 16 points PNP |
EX260-SEN3 | Instructions for Configurations file | ||
SI Unit EtherNet/IP™ Compatible Output 32 points NPN |
EX260-SEN2 | Instructions for Configurations file | ||
SI Unit EtherNet/IP™ Compatible Output 32 points PNP |
EX260-SEN1 | Instructions for Configurations file | ||
Hand Valve | VH | |||
5 Port Solenoid Valve | VQC5000 | |||
Cylinder Speed Checker (Request for Special) |
IN574-95 | |||
Heat Resistant Solid State Auto Switch | D-M9*J* | |||
Multistage Ejector | ZL | |||
Multi-counter for Stroke Reading Cylinder |
CEU5 | |||
Electric Actuator/ Guide Rod Slider |
LEL | |||
Lightweight and Compact Type Floating Joint | JT | |||
Electric Actuator/ Miniature Rod type/ Miniature Slide Table Type |
LEPY/LEPS | |||
Electric Actuator/ Low profile slider type |
LEM | |||
Stroke Reading Cylinder with Brake |
CE2 | |||
Vacuum Pad with Ejector | ZHP | |||
Peltier-Type Thermo-con Peltier-typewater cooled:140W,320W |
HEC-W | |||
Precision Regulator Air Operated Type |
IR2120 | |||
Precision Regulator Basic Type |
IR2000/2010/2020 | |||
Precision Regulator Basic Type |
IR1000/1010/1020 | |||
GW Unit CC-Link Compatible Compatible version:1.10 |
EX510-GMJ1 | |||
GW Unit PROFIBUS-DP Compatible Compatible version:V0 |
EX510-GPR1 | |||
GW Unit DeviceNet™ Compatible |
EX510-GDN1 | Instructions for Configurations file | ||
Peltier-Type Thermo-con Peltier-typewater cooled:600W,1200W |
HEC-W | |||
Regulator with Backflow Function | AR□K-B | |||
Regulator | AR-B | |||
Filter Regulator | AW-A | |||
Regulator | AR-A | |||
Ionizer / Fan type | IZF10R | |||
Directional Control Driver for Electric Cylinder | LC3F2 | |||
Electric Cylinder | LZC | |||
Electric Cylinder | LZB | |||
Air Saving Speed Controller with Pressure Regulation / Rapid Supply Function | AS□2R/AS□2Q | |||
Card Motor | LAT3 | |||
Aluminum High Vacuum Angle Valve Normally Closed / Bellows Seal |
XLA-2 | |||
Air Catch Sensor | ISA2 | |||
SI Unit CompoBus/S Compatible |
EX124U-SCS1,2 | |||
SI Unit CompoBus/S Compatible |
EX124D-SCS1,2 | |||
SI Unit CompoBus/S Compatible |
EX122-SCS1,2 | |||
SI Unit CompoBus/S Compatible |
EX121-SCS1,2 | |||
SI Unit CompoBus/S Compatible |
EX120-SCS1,2 | |||
GW Unit EtherNet/IP™ Compatible |
EX500-GEN2 | |||
SI Unit PROFINET Compatible |
EX500-GPN2 | |||
SI Unit DeviceNet™ Compatible Output 16 points PNP |
EX180-SDN6 | Instructions for Configurations file | ||
SI Unit DeviceNet™ Compatible Output 16 points NPN |
EX180-SDN4 | Instructions for Configurations file | ||
SI Unit DeviceNet™ Compatible Output 32 points PNP |
EX180-SDN5 | Instructions for Configurations file | ||
SI Unit DeviceNet™ Compatible Output 32 points NPN |
EX180-SDN3 | Instructions for Configurations file | ||
3 Position Valve with 3 Ports | VEX3 | |||
Air Cooled Thermo Con (Air-cooled) for Rack Mount Installation and Maintenance Manual |
HECR-A | |||
AC Servo Motor Driver / (Parameter Configuration using Setup software(SigmaWin+&trade)) |
LECY□ | |||
AC Servo Motor Driver / (Parameter Configuration using Setup software(MR Configurator2™)) |
LECS□ | |||
SI Unit CC-Link Compatible Compatible version:1.10 |
EX140-SMJ1 | |||
SI Unit CC-Link Compatible Compatible version:1.10 |
EX120-SMJ1 | |||
SI Unit DeviceNet™ Compatible |
EX124U-SDN1-X26/-X77 | Instructions for Configurations file | ||
SI Unit DeviceNet™ Compatible |
EX124D-SDN1-X26/-X77 | Instructions for Configurations file | ||
SI Unit DeviceNet™ Compatible |
EX122-SDN1-X26/-X77 | Instructions for Configurations file | ||
SI Unit DeviceNet™ Compatible |
EX121-SDN1-X26/-X77 | Instructions for Configurations file | ||
SI Unit DeviceNet™ Compatible |
EX124U-SDN1/-X2 | Instructions for Configurations file | ||
SI Unit DeviceNet™ Compatible |
EX120-SDN1-X26/-X77 | Instructions for Configurations file | ||
SI Unit DeviceNet™ Compatible |
EX124D-SDN1/-X2 | Instructions for Configurations file | ||
SI Unit DeviceNet™ Compatible |
EX122-SDN1/-X2 | Instructions for Configurations file | ||
SI Unit DeviceNet™ Compatible |
EX121-SDN1/-X2 | Instructions for Configurations file | ||
SI Unit DeviceNet™ Compatible |
EX120-SDN1/-X2 | Instructions for Configurations file | ||
Compact Guide Cylinder with Lock | MLGP | |||
3.0MPa Compatible High Pressure E/P Regular |
ITVH | |||
5.0MPa Compatible High Pressure E/P Regular |
ITVX | |||
Filter Regulator | IW212/213/215 | |||
Pressure Gauge for General Purpose | G43 | |||
M8 input unit/for block Assembly Instruction(Piercecon® connection) |
PCA-1557730 | |||
M12 input unit/for block Assembly Instruction(QUICKON-ONE conection) |
PCA-1557743 PCA-1557756 |
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EtherNet/IP EtherCAT PROFINET Assembly Instruction(IDC Connection (fast connection technology)) |
PCA-1446553 | |||
3-Position Rotary Table | MSZ | |||
Rotary Actuator with Solenoid valve | CVRA1-Z | |||
Rotary Table | MSUB | |||
Ionizer / Bar type | IZS31 | |||
Monitor Software for Motor Controller (LECP6/LECA6/LECPA/LECPMJ) |
LEC-WM | |||
Teaching Box for Electric Actuator | LEC-T1 | |||
China Pressure Vessel Regulations Compliant Product Air Tank for Regulators : Stainless steel |
VBAT20S1-T-X104 VBAT38S1-T-X104 |
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China Pressure Vessel Regulations Compliant Product Air Tank for Regulators : Carbon steel |
VBAT20A1-T-X104 VBAT38A1-T-X104 |
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SI Unit (Compatible input and output) EtherNet/IP™ Compatible |
EX600-SEN4 | |||
SI Unit (Compatible input and output) EtherNet/IP™ Compatible |
EX600-SEN3 | |||
Servo Motor Controller (24VDC) | LECA6 | Wiring Method | ||
3 Port Air Operated Valve | VGA342 | |||
Low Profile Air Gripper | MHF2 | |||
Compact Guide Cylinder | MGP-Z | |||
Ionizer / Fan type | IZF21/31 | |||
AC servo drive capacity selection program (For LECYM,LECYU) |
SigmaJunmaSize+ | |||
China Pressure Vessel Regulations Compliant Product Air Tank for Regulators : Stainless steel |
VBAT05S1-U-X104 VBAT10S1-U-X104 |
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Peltier-type Air-Thermo | HEA | |||
Mechanically Jointed Rodless Cylinder |
MY3A/3B/3M | |||
Mechanically Jointed Rodless Cylinder/Linear Guide Type | MY1HT | |||
Mechanically Jointed Rodless Cylinder/Linear Guide Type | MY1H | |||
Mechanically Jointed Rodless Cylinder/Cam follower guide | MY1C | |||
Mechanically Jointed Rodless Cylinder/Slide bearing | MY1M | |||
Mechanically Jointed Rodless Cylinder/Basic Type | MY1B | |||
Mechanically Jointed Rodless Cylinder/Linear Guide Type | MY1H-Z | |||
Mechanically Jointed Rodless Cylinder/Basic Type | MY1B-Z | |||
Digital Flow Switch for Deionized Water and Chemicals |
PF2D2□□ | |||
Digital Flow Switch for Water | PF2W20□ | |||
Industrial Filter/Vessel Series | FGE | |||
Mechanically Jointed Rodless Cylinder Linear guide |
MY2H/HT | |||
Mechanically Jointed Rodless Cylinder Cam follower guide |
MY2C | |||
China Pressure Vessel Regulations Compliant Product Air Tank for Regulators : Carbon steel |
VBAT05A1-U-X104 VBAT10A1-U-X104 |
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IP Address Setting Software for EtherNet/IP™ Applicable Gateway Unit,LEC-GEN1 |
IP Configuration Software | |||
5 Port Solenoid Valve Base Mounted |
VFS6000 | |||
5 Port Solenoid Valve Body Ported |
VFS2000 | |||
5 Port Solenoid Valve Body Ported |
VFS3000 | |||
5 Port Solenoid Valve Base Mounted |
VFS5000 | |||
5 Port Solenoid Valve Base Mounted |
VFS4000 | |||
5 Port Solenoid Valve Base Mounted |
VFS3000 | |||
5 Port Solenoid Valve Base Mounted |
VFS2000 | |||
5 Port Solenoid Valve Body Ported |
VFS1000 |